JPS61127640U - - Google Patents

Info

Publication number
JPS61127640U
JPS61127640U JP936485U JP936485U JPS61127640U JP S61127640 U JPS61127640 U JP S61127640U JP 936485 U JP936485 U JP 936485U JP 936485 U JP936485 U JP 936485U JP S61127640 U JPS61127640 U JP S61127640U
Authority
JP
Japan
Prior art keywords
carrier
wafer
semiconductor wafer
semiconductor
semiconductor wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP936485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP936485U priority Critical patent/JPS61127640U/ja
Publication of JPS61127640U publication Critical patent/JPS61127640U/ja
Pending legal-status Critical Current

Links

JP936485U 1985-01-26 1985-01-26 Pending JPS61127640U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP936485U JPS61127640U (en]) 1985-01-26 1985-01-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP936485U JPS61127640U (en]) 1985-01-26 1985-01-26

Publications (1)

Publication Number Publication Date
JPS61127640U true JPS61127640U (en]) 1986-08-11

Family

ID=30489513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP936485U Pending JPS61127640U (en]) 1985-01-26 1985-01-26

Country Status (1)

Country Link
JP (1) JPS61127640U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64743A (en) * 1987-02-13 1989-01-05 Tokyo Electron Ltd Counter for wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64743A (en) * 1987-02-13 1989-01-05 Tokyo Electron Ltd Counter for wafer

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